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Enhanced Sensitivity of Atomic-Resolution Spectroscopic Imaging by Direct Electron Detection
2017
Microscopy and Microanalysis
With recent technical advances in spectroscopic imaging using electron energy loss spectroscopy (EELS) performed in an aberration-corrected STEM, we are now able to study the chemical and electronic structures of materials with atomic-resolution [1]. Challenges, however, remain; particularly for applications that require short acquisition times or those that are limited to low electron dose such as the mapping of beam sensitive materials. Improving the signal-to-noise ratio (SNR) of spectra
doi:10.1017/s1431927617002513
fatcat:avcw6zdvjjff5f2yeh254bcrxe