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We studied the growth of indium-rich InGaP nanowires (NWs) on InP (111)A substrates by selective-area metal organic vapor phase epitaxy (SA-MOVPE). We obtained vertically aligned InGaP NWs by optimizing growth conditions, such as group III supply ratio and V/III ratio. We found that the height, diameter, shape, and composition of InGaP NWs depended significantly on the supply ratios of trimethylgallium (TMGa) and trimethylindium (TMIn). As the supply ratio of TMGa was increased, the lateraldoi:10.7567/jjap.52.04ch05 fatcat:mjqvqszk2zbqxjwn22u6hzmvc4