MEMS are typically defined as the devices or systems which are integrated with electrical and mechanical components on a silicon substrate through the microfabrication techniques. Due to its low cost, small size, low power consumption with high efficiency, MEMS technology has been widely used in many fields. In this paper, the design and simulation of a magnetic micropump with tri-membrane fully differential structure is presented. The proposed micropump has two inlets and two outlets. It has

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... o pumping chambers sealed by three Si membranes. A permanent magnet is deposited on the middle membrane. Poly-Si coils are deposited on the top and bottom membranes separately. When electrical current is conducted in the coil, a magnetic field is excited, and its polarity (north and south poles) can be easily exchanged by reversing the conducting current. The design and analysis of the micropump has been discussed in details, and based on those theoretical analysis, a set of optimized design parameter has been achieved. The ANSYS simulation is used to verify the function of micropump. The proposed micropump leads to improved pumping rate with better efficiency.