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Research/Researchers
1991
MRS bulletin
High reflectance/anti-reflectance coatings, detectors, ring laser gyros, superconductors, diamond-like carbon, semiconductors, transparent conductors, magnetic materials. Complète déposition Systems and sources for thin film coatings by ion beam techniques, from the leader in broad-beam ion source technology. CORPORATION Kaufman-type ion sources for ion assisted déposition, ion beam sputter déposition and ion beam precleaning; easily retrofittable into existing vacuum Systems; offers independent control of ion source parameters.
doi:10.1557/s0883769400057043
fatcat:qtrtwghl5nappim4f5qrixxkra