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Multi-beam laser heterodyne measurement with ultra-precision for the glass thickness based on oscillating mirror sinusoidal modulation
In this paper, We propose a novel method of measuring glass thickness by means of multi-beam laser heterodyne. Based on the Doppler effect and the heterodyne technology, loading the information about the glass thickness into the frequency difference of the multi-beam laser heterodyne signals by sinusoidal frequency modulation of the oscillating mirror that is in a simple harmonic motion, we can simultaneously obtain many values of the glass thickness through the multi-beam laser heterodynedoi:10.7498/aps.61.044207 fatcat:pyu3h6uhdzhkrglclm5b7wwcwu