3D-Simulation of an Enhanced Field-Funneling Effect on the Collection of Alpha-Particle-Generated Carriers in P− on P+ Epitaxial Substrates [chapter]

T. Kunikiyo, K. Sonoda, T. Yamashita, K. Ishikawa, T. Nishimura
1998 Simulation of Semiconductor Processes and Devices 1998  
We have investigated the soft-error phenomena in p~ on p + epitaxial substrates using three dimensional device simulator. We demonstrate for the first time that the field-funncling on the collection of alpha-particle-generated carriers in a memory cell is enhanced in a p~ on p + epitaxial substrate in comparison with that in a p~-typc Czochralski substrate. In addition, we have found the reason why the epitaxial-layer thickness dependence of the charge-collection in a memory cell is opposite to
more » ... cell is opposite to that in a TEG (Test Element Group) structure having a large charge-collection area.
doi:10.1007/978-3-7091-6827-1_99 fatcat:o62q2i46srhwfpvlrqe42r3ayq