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3D-Simulation of an Enhanced Field-Funneling Effect on the Collection of Alpha-Particle-Generated Carriers in P− on P+ Epitaxial Substrates
[chapter]
1998
Simulation of Semiconductor Processes and Devices 1998
Preserved Fulltext
We have investigated the soft-error phenomena in p~ on p + epitaxial substrates using three dimensional device simulator. We demonstrate for the first time that the field-funncling on the collection of alpha-particle-generated carriers in a memory cell is enhanced in a p~ on p + epitaxial substrate in comparison with that in a p~-typc Czochralski substrate. In addition, we have found the reason why the epitaxial-layer thickness dependence of the charge-collection in a memory cell is opposite to
doi:10.1007/978-3-7091-6827-1_99
fatcat:o62q2i46srhwfpvlrqe42r3ayq