Atomic layer deposition of Nb-doped ZnO for thin film transistors

A. Shaw, J. S. Wrench, J. D. Jin, T. J. Whittles, I. Z. Mitrovic, M. Raja, V. R. Dhanak, P. R. Chalker, S. Hall
2016 Applied Physics Letters  
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doi:10.1063/1.4968194 fatcat:nk4l7iqzfjbjvezhseuwrqqbd4