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H∞ robustification control of existing piezoelectric-stack actuated nanomanipulators
2009 IEEE International Conference on Robotics and Automation
In current AFM-based nanomanipulation systems, the commercial position closed-loop controller for piezoelectric nanopositioning stages are implemented with success in a wide range of industrial applications. Even if these controllers operate with satisfactory nominal tracking performance, considerable attention has been focused on appropriate control strategies to compensate hysteresis, nonlinearities, drift and creep for high bandwidths and large scanning regimes. As these closedloopdoi:10.1109/robot.2009.5152701 dblp:conf/icra/LadjalHF09 fatcat:cykrelmabrbazeedasnkgrfyce