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Effect of Substrate Surfacace Treatment before Sputtering on Magnetic Properties of CoCrTa Media
1993
Journal of the Magnetics Society of Japan
Preserved Fulltext
CoCrTa 磁気記操媒体の磁気特性に及ぼす スバッタ蔀の基板処理の影響 E f f e c t 0 f S u b s t r 晶 t e S u r f a c 官 ヤ reatment befor 巴 Sputtering on M 語 gn 母 tic Propert es of CoCrTa M 告 d i a
doi:10.3379/jmsjmag.17.s2_160
fatcat:si3xmxxplvblpksd6aesjfbxbu