Improved electrical performance of erbium silicide Schottky diodes formed by Pre-RTA amorphization of Si

E.J. Tan, K.L. Pey, D.Z. Chi, P.S. Lee, L.J. Tang
2006 IEEE Electron Device Letters  
doi:10.1109/led.2005.863142 fatcat:ykom5xtcqnbk7f6flwmcddqqry