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Extreme ultraviolet (XUV) single-order high harmonic pulses with 10 6 photons/pulse were separated from multiple harmonic orders by a time-compensated toroidal-grating monochromator consisting of a pair of toroidal gratings. The first grating separates the harmonic order and the second one compensates for the pulse-front tilt. The center photon energies were tunable between 42 and 23 eV. The separated single harmonic pulses were spatially and temporally characterized as having a spot size of 58doi:10.1364/oe.18.006071 pmid:20389628 fatcat:5qahtypinjbjrdcqk3ivpt54pq