Coupling effects of driving frequencies on the electron heating in electronegative capacitive dual-frequency plasmas

A Derzsi, Z Donkó, J Schulze
2013 Journal of Physics D: Applied Physics  
The coupling effects of low-frequency (LF) and high-frequency (HF) driving sources on plasma parameters and electron heating dynamics are investigated in low-pressure electronegative capacitive discharges. Kinetic particle simulations reveal frequency coupling mechanisms different from those characteristic of electropositive discharges operated in αand/or γ -mode due to the presence of the drift-ambipolar electron heating mode in electronegative plasmas. Here, the LF component affects the
more » ... t affects the electron heating at the collapsing sheath and inside the plasma bulk, having consequences on the separate control of ion properties and the electronegativity of the plasma.
doi:10.1088/0022-3727/46/48/482001 fatcat:rcm77gcif5cwdel6rs3k5vkota