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Three-dimensional surface phase imaging based on integrated thermo-optic swept laser
2014
Measurement science and technology
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We developed an optical frequency domain imaging (OFDI) system based on an integrated thermo-optic swept laser to achieve three-dimensional surface imaging. The wavelength was swept by applying a heating signal to a thermo-optic polymeric waveguide. The sub-micrometer surface profile was converted from the three-dimensional phase information of the OFDI system on various samples used as resolution targets with a step height of 120 nm.
doi:10.1088/0957-0233/25/3/035201
fatcat:zkotnzv5z5gkzbnsw7sk6xjbpu