A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2019; you can also visit the original URL.
The file type is
Three-dimensional surface phase imaging based on integrated thermo-optic swept laser
Measurement science and technology
We developed an optical frequency domain imaging (OFDI) system based on an integrated thermo-optic swept laser to achieve three-dimensional surface imaging. The wavelength was swept by applying a heating signal to a thermo-optic polymeric waveguide. The sub-micrometer surface profile was converted from the three-dimensional phase information of the OFDI system on various samples used as resolution targets with a step height of 120 nm.doi:10.1088/0957-0233/25/3/035201 fatcat:zkotnzv5z5gkzbnsw7sk6xjbpu