Three-dimensional surface phase imaging based on integrated thermo-optic swept laser

Hyo Jin Kim, Jaedu Cho, Young-Ouk Noh, Min-Cheol Oh, Zhongping Chen, Chang-Seok Kim
2014 Measurement science and technology  
We developed an optical frequency domain imaging (OFDI) system based on an integrated thermo-optic swept laser to achieve three-dimensional surface imaging. The wavelength was swept by applying a heating signal to a thermo-optic polymeric waveguide. The sub-micrometer surface profile was converted from the three-dimensional phase information of the OFDI system on various samples used as resolution targets with a step height of 120 nm.
doi:10.1088/0957-0233/25/3/035201 fatcat:zkotnzv5z5gkzbnsw7sk6xjbpu