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Micro- and Nanotechnology Sensors, Systems, and Applications II
With quality factors (Q) often-exceeding 10,000, vibrating micromechanical resonators have emerged as leading candidates for on-chip versions of high-Q resonators used in wireless communications systems. However, as in the case for transistors, extending the frequency of MEMS resonators generally entails scaling of resonator dimensions. Unfortunately, smaller size often coincides with lower-power handling capability and increased motional impedance. In this paper we introduce novel transductiondoi:10.1117/12.849296 fatcat:ooknbwm63bblvlmjrbtbvlouzy