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Transport Coefficients For Electrons in Mixtures CF4/Ar/O2and CF, CF2or CF3Radicals
Acta Physica Polonica. A
Transport coefficients for electrons in mixtures of CF 4 with Ar and O 2 for ratios of the electric field to the gas number density E/N from 1 Td to 1000 Td (1Td = 10 −21 V m 2 ) are presented. The analysis of non-conservative collisions revealed a range of the reduced electric field E/N where electron attachment introduced by radicals significantly changes electron kinetics obtained for mixtures without dissociation of CF 4 gas. The results obtained by using a simple, Two Term solutions fordoi:10.12693/aphyspola.120.289 fatcat:yykcixs73vhabng2ops33mz2pe