Development of an Wet/Dry Hybrid Deposition to Form ITO
ITOのハイブリッド成膜の開発

稲葉 和久, 田中 英樹, 安部 真司, 土門 孝彰
2011 MES  
The past few years, the demand of ITO films have been increasing. However, it appears that capacitive type increases more than resistive type since most of global makers are supplying capacitive type touch panel solutions. Utilizing the experience of coating method, we developed a fusion method of wet coating and sputtering technology, which contributes to the superior performance below.Our technology enormously contributes to high-grade optical properties.
doi:10.11486/mes.21.0_69 fatcat:lmsxphclwnfodhru7p4lwzft3q