Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas

Masaharu Shiratani, Kazunori Koga, Kunihiro Kamataki, Shinya Iwashita, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki
2013 Japanese Journal of Applied Physics  
doi:10.7567/jjap.53.010201 fatcat:nbg2bwya7vazjm7so2noug76bm