Research Objectives for the First Year I-sw The University of Chicago (UC) and Hughes Research Laboratories (HRL) collaborative program aims at the development and construction of two 60 keV high resolution (10-100 X), high current density (IA/cm 2 ) ion microscopes/microprobes over a three year period. A pictorial summary of the organization of the project ) and its funding is contained in Fig. 1 . Two sets of coordinated technical and scientific tasks form an integral part of the UC-HRL

more »

... m. A phasing diagram r for these tasks is given in Fig. 2 , also showing the repartitioning of DOD (through AFOSR) and NSF support among the various tasks. The research objectives for the first year of the program, comprehensive of both the UC and HRL effort, are incorporated in the following main tasks: 1. Design studies using the existing ion probes. At UC these comprised the installation of an HRL-built EHD liquid gallium source in the existing Chicago STIM. The determination of the energy spectrum and beam composition of the source, and the assessment of the performance of counting detector electronics under high counting rates. At HRL this task consisted in further exploration of the factors limiting * the resolution which can be achieved with one of their existing single-lens focusing columns. The results of these parallel investigations were to help in finalizing several aspects of the design and instrumentation relative to the new high performance ion probes to be constructed. 2. New ion microscope development. The initial phase of this task, common to both UC and HRL, involved the performance of optical calculations leading to an optimized microscope design, the preparation of a preliminary instrument design and of part of the engineering design, and the choice and procurements of components and instrumentation. I Close contact between the UC and HRL team was to be maintained through periodic meetings during this critical decision-making stage.