A Research on Microstep Mechanism Utilizing Hysteresis of Piezoelectric Element (Certification of Driving Principle by Analysis and Experiment)
圧電素子の非線形性を利用したマイクロ移動機構の研究(解析と実験による駆動原理の確認)

Hiroshi OKABE, Susumu SAKANO
2004 Transactions of the Japan Society of Mechanical Engineers Series C  
doi:10.1299/kikaic.70.1395 fatcat:vzy4laudrbd5faocdr6jhm6whm