Plane-view transmission electron microscopy of Si/GaAs interfaces fabricated by surface-activated bonding at room temperature

Yutaka Ohno, Hideto Yoshida, Seiji Takeda, Liang Jianbo, Naoteru Shigekawa
2017 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)   unpublished
doi:10.23919/ltb-3d.2017.7947400 fatcat:hea2jjcjd5fmfo6w7kvjmj73xe