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703 Development of functional micro-pins by micro fabrication system
703 ELIDマイクロファブリケーションシステムによる機能性微細ピンの製作技術(OS7-(1),OS7 オーガナイズドセッション《精密/微細加工と評価》)

Kazuaki YAMADA, Nobuhide ITO, Akihiro OHTSUKA, Yoshihiro UEHARA, Hitoshi OMORI
2014 The Proceedings of Ibaraki District Conference  

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doi:10.1299/jsmeibaraki.2014.22.101 fatcat:rplxzsmuxnbtnoluibvgmyp5qe
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Kazuaki YAMADA, Nobuhide ITO, Akihiro OHTSUKA, Yoshihiro UEHARA, Hitoshi OMORI. "703 Development of functional micro-pins by micro fabrication system." The Proceedings of Ibaraki District Conference 2014.22.0 (2014) 101-102