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Optical Manufacturing and Testing VIII
Computer controlled optical surfacing (CCOS) requires accurate knowledge of the tool influence function (TIF) for the polishing tool. The linear Preston's model for material removal has been used to determine the TIF for most cases. As the tool runs over the edge of the workpiece, however, nonlinear removal behavior needs to be considered to model the edge TIF. We reported a new parametric edge TIF model in a previous paper.** This model fits 5 parameters to measured data to accurately predictdoi:10.1117/12.828499 fatcat:igromqr7rvg6jklbg4gj63ob5e