A novel design of piezo-driven dual-dimension optical scanning mechanism

S. H. Chang, Y. C. Tung
1998 Review of Scientific Instruments  
An optical scanning mechanism capable of dual-dimension scanning is presented. The mechanism uses a piezoelectric element to drive a V-shaped reflecting mirror surface through two pairs of elastic beams. The design entails the use of various vibration modes to reflect the incident light in orthogonal directions. The design, fabrication, and mechanical, electrical, and optical performance of this scanning mechanism are presented. The scanning sensitivities of 88.8 and 19.3 rad/V in each scanning
more » ... direction are measured when operated at frequencies of 23.8 and 48.8 kHz, respectively. The capability of fine scanning sensitivity, high operating frequency, and wide scanning range is applicable for fine adjustment of the laser beam.
doi:10.1063/1.1149092 fatcat:kzpcygkauzd2xgmksbfr2b3gz4