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A novel design of piezo-driven dual-dimension optical scanning mechanism
1998
Review of Scientific Instruments
An optical scanning mechanism capable of dual-dimension scanning is presented. The mechanism uses a piezoelectric element to drive a V-shaped reflecting mirror surface through two pairs of elastic beams. The design entails the use of various vibration modes to reflect the incident light in orthogonal directions. The design, fabrication, and mechanical, electrical, and optical performance of this scanning mechanism are presented. The scanning sensitivities of 88.8 and 19.3 rad/V in each scanning
doi:10.1063/1.1149092
fatcat:kzpcygkauzd2xgmksbfr2b3gz4