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2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
We present a reprogrammable Microelectromechanical systems (MEMS) logic device that can perform the fundamental logic gate AND, a universal logic gate NAND, and a tristate logic gate using mixed-frequency excitation. The concept is based on exciting combination resonances due to the mixing of two or more input signals. The device vibrates at two steady states; a high state when the combination resonance is activated and a low state when no resonance is activated. These vibration states aredoi:10.1109/memsys.2017.7863548 fatcat:dchaew6gmfgdflcoliwqsftoxe