A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf.
Hybrid Numerical Simulation of Micro Electro Mechanical Systems
2006
PIERS Online
Preserved Fulltext
In this paper a hybrid numerical approach for the simulation of micro electro mechanical systems (MEMS) is presented. A simulation model that takes into account the mechanical and the electrical effects is developed. The model is applied to an electrostatic force microscope (EFM) and simulation results are presented.
doi:10.2529/piers050907123514
fatcat:mc7ow3biknastebdcvm5cxdl2y