Hybrid Numerical Simulation of Micro Electro Mechanical Systems

Michael Greiff, Uzzal Binit Bala, W. Mathis
2006 PIERS Online  
In this paper a hybrid numerical approach for the simulation of micro electro mechanical systems (MEMS) is presented. A simulation model that takes into account the mechanical and the electrical effects is developed. The model is applied to an electrostatic force microscope (EFM) and simulation results are presented.
doi:10.2529/piers050907123514 fatcat:mc7ow3biknastebdcvm5cxdl2y