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Content-based image retrieval for semiconductor manufacturing
Machine Vision Applications in Industrial Inspection VIII
In the semiconductor manufacturing environment, defect imagery is used to diagnose problems in the manufacturing line, train automatic defect classification systems, and examine historical data for trends. Image management in semiconductor yield management systems is a growing cause of concern since many facilities collect 3000 to 5000 images each month, with future estimates of 12,000 to 20,000. Engineers at Oak Ridge National Laboratory (ORNL) have developed a semiconductor-specificdoi:10.1117/12.380070 fatcat:ugyo47gjxjah5jnfuomqs6yrg4