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Dust grains as a Diagnostic Tool for RF-Discharge Plasma
2003
AIP Conference Proceedings
Dust particles can be a useful plasma diagnostic tool. Sufficiently dust particles can be used as test grains for the visualization of the plasma potential distribution; larger dust particles can be used as specific probes to determine electron temperature. Here we report on diagnostic measurements carried out in a capacitively coupled planar rf discharge. The location of the sheath edge has been determined using test dust grains. Our diagnostic technique is based on measuring the equilibrium
doi:10.1063/1.1593873
fatcat:cw7ckidfqvgm5en7xcib4fb5hy