Direct measurement of optical constants of metals from a KrF excimer using polarization methods

Suleyman Turgut, Bruce W. Smith, Marylyn H. Bennett
1995 Integrated Circuit Metrology, Inspection, and Process Control IX  
A simple null modulation-polarization method ofmeasuring optical constants ofmetals has been adapted for operation with a KrF 248nm excimer laser. The approach requires only 3 optical components to extract the real and imaginary parts ofthe index ofrefraction (n,k). Experimental results will show good agreement to reference values for several metals (Cr, Au, Al) and Si.
doi:10.1117/12.209235 fatcat:45a2idkaj5es7jihrudcqmlsea