Laser formation of nano-Si structures in glasses

E S Babich, A V Redkov, V G Melehin, D Khlopin, A A Lipovskii
2019 Journal of Physics, Conference Series  
The irradiation of a BOROFLOAT ® 33 glass plate with lithographically-fabricated array of aluminum nanodisks on the surface by a focused low-power 523 nm laser beam resulted in the formation of silicon nanocrystals in the subsurface layer of the glass. The nano-Si was registered with Raman scattering technique. The formation of the nano-Si is local and grown nanocrystals are stable.
doi:10.1088/1742-6596/1410/1/012248 fatcat:qgwyma6nprdjxipce4t4p6a54y