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IEEE Sensors, 2005.
Batch mode micro-electro-discharge machining ( EDM) is a lithography-compatible microfabrication method suitable for making devices from bulk metals, including stainless steel. In high-density patterns, spurious discharges through debris can cause workpiece edge rounding, fast tool wear, and mushroom-shaped metal recasting of the tool. This paper reports a Si coating technique that acts as a discharge barrier on the sidewalls of batch Cu tools to diminish these effects. Copper tools weredoi:10.1109/icsens.2005.1597675 fatcat:ckjhaif6tzelrpaisjcf34uv5q