A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is
In the past decade, femtosecond (fs) laser microfabrication has received significant attention because of its powerful three-dimensional (3D) integrating and manufacturing capabilities. A series of multifunctional micro-components and micro-devices, including microoptics, microfluidics, micromechanics, microelectrics, microplasmonics, and so on, can be fabricated and integrated in glass chips with true 3D configurations using a unified fs laser microprocessing technique. For this reason, thisdoi:10.2184/lsj.36.1206 fatcat:aets3u76ebewrldkzl2fi2ltzy