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For the first time, the physical and electrical properties of lead-strontium-titanate ͑PST͒ thin films were prepared by liquid-source misted chemical deposition, and are reported. PST thin films were deposited on a platinum-coated Si wafer. Pb acetate, Sr acetate, and Ti isoproxide were used as metallic precursors. These were dissolved in 2-methoxyethnol. A fine mist of metallic precursor solution was carried into a deposition chamber by Ar carrier gas. The crystallization of PST thin film wasdoi:10.1116/1.1333082 fatcat:6dt2ds5bgfhjvnudwlqyixufcu