The high speed performance of a scanning probe microscope ͑SPM͒ is improved if a microelectromechanical systems ͑MEMS͒ device is employed for the out-of-plane scanning motion. We have carried out experiments with MEMS high-speed z-scanners ͑189 kHz fundamental resonance frequency͒ in both atomic force microscope and scanning tunneling microscope modes. The experiments show that with the current MEMS z-scanner, lateral tip speeds of 5 mm/s can be achieved with full feedback on surfaces with

more »

... ficant roughness. The improvement in scan speed, obtained with MEMS scanners, increases the possibilities for SPM observations of dynamic processes. Even higher speed MEMS scanners with fundamental resonance frequencies in excess of a megahertz are currently under development.