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2-05P-25 アンテナ構造MEMS振動子の量子変位の検討(ポスターセッション 2)
2-05P-25 Investigation of the quantized displacement observed in an antenna structure typed MEMS resonator(Poster session 2)
Proceedings of Symposium on Ultrasonic Electronics
2-05P-25 Investigation of the quantized displacement observed in an antenna structure typed MEMS resonator(Poster session 2)
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Steeringcommittee ofsymposlum onultrasonic electronics 2.osp.2s prececdings ofSymposium on Ultrasonic ElectrO"'CS, Vbl'218a-(126011iL)t,P.Pb2,4"3 Investigation of the quantized displacement observed in an antenna structure typed MEMS resonator 7 )i 7 -Jas inth MEMS lk si i: CD ! i: X tll( (D lt E・t
doi:10.24492/use.28.0_243
fatcat:ivmkoqpecrgelh6zfdckaf5lcu