Particle transport phenomena were investigated in silane plasmas in the presence of magnetic field B perpendicular to discharge electric field E. ¿From the experimental results, it was known that silicon particles were transported in the opposite direction of the E × B drift, and the particle density was decreased with increasing applied magnetic flux density. Theoretical calculations on particle drift show that negatively charged particles can be transported in the opposite direction of E × B

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... rift and its drift velocity is increased with B for the present experimental conditions. Both of experimental and theoretical results suggest that transport by modified ambipolar E × B drift can eliminate particles from discharge space.