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Effects of Coating Layers on Properties of LGS SAW Resonators
2018
DEStech Transactions on Engineering and Technology Research
Surface acoustic wave (SAW) sensors are very sensitive to the external environment, when the devices are working in a complex environment, SAW sensors must be protected. This paper reports the study of SAW resonators based on coating layer/LGS substrate package-less structure. AlN, Al 2 O 3 and Si 3 N 4 thin films were selected as protective coating layer materials. The SAW resonators with different thicknesses of coating layers were simulated and fabricated. The device performances in terms of
doi:10.12783/dtetr/apop2017/18772
fatcat:uo7oboeenfcdtc7k4e6sriop5y