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In this work an influence of thermal annealing of Mn-implanted silicon on strain state of silicon matrix is presented. During post-implantation annealing, nanocrystalline tetragonal Mn4Si7 compound is formed. A strong correlation between the size of nanoinclusions and the matrix strain state is detected.doi:10.1063/1.121593 fatcat:l5etoxmllfacxctto67jm4dxdu