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Active control methods are used to suppress vibrations in a pneumatic isolation table. To suppress vibration for large displacements, it is necessary to switch the control input instantaneously to the maximum or minimum input values. Therefore, active control by quantized control input generated using the on-off valves is suitable. To obtain high performance, it is necessary to consider the quantized action by on-off valves and the input time-delay that arises from loss of pressure. Andoi:10.9746/sicetr.49.488 fatcat:5bytatyh3ngsjluarvggikcsaa