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Electrophoretic Deposition of Pb(Zr, Ti)O3 Powder on Si Wafer: Morphological Change Across Film Thickness
2006
Journal of the Ceramic Society of Japan
Note péÉÅá~ä fëëìÉ Äó dìÉëí bÇáíçêëW kçîÉä j~íÉêá~äë aÉëáÖå~åÇ mêçÅÉëëáåÖ Äó bñíÉêå~ä åÇ fåíÉêå~ä oÉ~Åíáçå cáÉäÇë bäÉÅíêçéÜçêÉíáÅ aÉéçëáíáçå çÑ mÄwê, qál P mçïÇÉê çå pá t~ÑÉêW jçêéÜçäçÖáÅ~ä'Ü~åÖÉ^Åêçëë cáäã qÜáÅâåÉëë PZT thick films were prepared using electrophoretic deposition EPD process with special emphasis placed on the powder packing behavior on silicon substrates. The suspending medium used was an ethanol solution containing an appropriate amount of HCl to introduce surface charges to
doi:10.2109/jcersj.114.128
fatcat:kj5xaz2bczbyrjticdmavyzb7q