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A boron-doped hydrogenated amorphous diamondlike carbon (a-DLC:H͒ was prepared using a mercury-sensitized photochemical vapor deposition ͑photo-CVD͒ method. The source gases were B 2 H 6 and C 2 H 4 . By increasing the boron doping ratio (B 2 H 6 /C 2 H 4 ) from 0 to 12 000 ppm, the dark conductivity increased from ϳ10 Ϫ9 to ϳ10 Ϫ7 S/cm. A boron-doped a-DLC:H with an energy band gap of 3.8 eV and a dark conductivity of 1.3ϫ10 Ϫ8 S/cm was obtained at a doping ratio of 3600 ppm. By using thisdoi:10.1063/1.120659 fatcat:a2holtmbvnesvhlvstulsmf3aa