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IEEE Sensors Journal
This paper presents the experimental characterization of two-terminal microfabricated capacitors for microarrays with an electrical sensing of label-free deoxyribonucleic acid (DNA). So far, such a concept has been demonstrated only in experimental setups featuring dimensions much larger than those typical of microfabrication. Therefore, this paper investigates: 1) the compatibility of the silicon microelectronic processes with biological functionalization procedures; 2) the effects ofdoi:10.1109/jsen.2006.877979 fatcat:ep55mvfbcvewjg3xekvuzmqdbe