Microelectrodes on a Silicon Chip for Label-Free Capacitive DNA Sensing

C. Guiducci, C. Stagni, A. Fischetti, U. Mastromatteo, L. Benini, B. Riccoricco
2006 IEEE Sensors Journal  
This paper presents the experimental characterization of two-terminal microfabricated capacitors for microarrays with an electrical sensing of label-free deoxyribonucleic acid (DNA). So far, such a concept has been demonstrated only in experimental setups featuring dimensions much larger than those typical of microfabrication. Therefore, this paper investigates: 1) the compatibility of the silicon microelectronic processes with biological functionalization procedures; 2) the effects of
more » ... effects of parasitics when electrodes have realistic dimensions; 3) measurement stability and reproducibility; and 4) the possibility of a fully integrated stand-alone device. The obtained results clearly indicate that two-terminal capacitive sensing with fully integrated electronics represents a viable technology for a DNA label-free detection/recognition. Index Terms-Capacitance detection on a silicon lab on a chip, fully electrical deoxyribonucleic acid (DNA) detection technique, gold microelectrodes, impedance spectroscopy, label-free technique.
doi:10.1109/jsen.2006.877979 fatcat:ep55mvfbcvewjg3xekvuzmqdbe