INVESTIGATION OF USING TAPERED COPLANAR WAVEGUIDE IN RF MEMS PHASE SHIFTER

B Nataraj, K Porkumaran
2013 U.P.B. Sci. Bull., Series C   unpublished
This paper presents the analysis and design of coplanar waveguide (CPW) in distributed MEMS phase shifters for communication systems. The phase shift can be obtained by changing MEMS Bridge capacitors located periodically over the transmission line. Simulation results of phase shifters with various structural parameters of CPW are analyzed to develop the optimized designs. The various structures of CPW are analyzed using quasi-TEM conformal mapping technique. The phase shifters are designed on
more » ... rs are designed on the high-resistivity silicon substrate, using suspended AuSi bridge membrane. The simulated results demonstrate a phase shift of 286 at 36 GHz with the actuation voltage of 25 V, and a return loss better than 10 dB over 0-40 GHz band. It shows that the use of tapered CPW in phase shifter design produces more phase shift per unit length compared with conventional CPW phase shifter.
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