Microhollow cathode discharge excimer lamps

Karl H. Schoenbach, Ahmed El-Habachi, Mohamed M. Moselhy, Wenhui Shi, Robert H. Stark
2000 Physics of Plasmas  
Microhollow cathode discharges are high-pressure, nonequilibrium gas discharges between a hollow cathode and a planar or hollow anode with electrode dimensions in the 100 m range. The large concentration of high-energy electrons, in combination with the high-gas density favors excimer formation. Excimer emission was observed in xenon and argon, at wavelengths of 128 and 172 nm, respectively, and in argon fluoride and xenon chloride, at 193 and 308 nm. The radiant emittance of the excimer
more » ... on was found to increase monotonically with pressure. However, due to the decrease in source size with pressure, the efficiency ͑ratio of excimer radiant power to input electrical power͒, has for xenon and argon fluoride a maximum at ϳ400 Torr. The maximum efficiency is between 6% and 9% for xenon, and ϳ2% for argon fluoride.
doi:10.1063/1.874039 fatcat:gjwjhplnindtrl4tvr7ndj55bm