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Microhollow cathode discharge excimer lamps
2000
Physics of Plasmas
Microhollow cathode discharges are high-pressure, nonequilibrium gas discharges between a hollow cathode and a planar or hollow anode with electrode dimensions in the 100 m range. The large concentration of high-energy electrons, in combination with the high-gas density favors excimer formation. Excimer emission was observed in xenon and argon, at wavelengths of 128 and 172 nm, respectively, and in argon fluoride and xenon chloride, at 193 and 308 nm. The radiant emittance of the excimer
doi:10.1063/1.874039
fatcat:gjwjhplnindtrl4tvr7ndj55bm