A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2021; you can also visit the original URL.
The file type is application/pdf
.
Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone
2021
Applied Sciences
Microelectromechanical system (MEMS) directional microphones have been identified as having use in multi-projected virtual reality applications such as virtual meetings for projecting cameras. In these applications, the acoustic sensitivity plays a vital role as it biases the directional sensing, signal-to-noise ratio (SNR) and self-noise. The acoustic sensitivity is the multiplied outcome of the mechanical sensitivity and the electrical sensitivity. As the dimensions are limited in MEMS
doi:10.3390/app11031305
doaj:52101093ed95409ca5f45005a0e8d67f
fatcat:a3mwwvdshjd3rpwh2k3642h67e