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Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)
2001
Reliability, Testing, and Characterization of MEMS/MOEMS
MEMS are rapidly emerging as critical components in the telecommunications industry. This enabling technology is currently being implemented in a variety of product and engineering applications.
doi:10.1117/12.442999
fatcat:oul4v722qrevnjqivq2ddypyhy