Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)

Jeremy A. Walraven, Edward I. Cole, Jr., Lynn R. Sloan, Susan L. Hietala, Chris P. Tigges, Christopher W. Dyck, Rajeshuni Ramesham
2001 Reliability, Testing, and Characterization of MEMS/MOEMS  
MEMS are rapidly emerging as critical components in the telecommunications industry. This enabling technology is currently being implemented in a variety of product and engineering applications.
doi:10.1117/12.442999 fatcat:oul4v722qrevnjqivq2ddypyhy