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High resolution (from nanometer to subnanometer) stepping drives of a surface acoustic wave motor are presented. It was shown that step displacement was easily controlled by adjusting a number of driving waves, using a steel ball slider equipped with permanent magnet for preload. By means of this open loop control, the step displacement was controlled from centimeter-order to submicrometer-order. In this paper, using a silicon slider equipped with a ball bearing linear guide, the steppingdoi:10.1109/tuffc.2003.1197960 fatcat:m266jxx7ybeplocg3x2zbjr5u4