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2001 needs for multi-level interconnect technology
IEEE Circuits & Devices
Needs for Multi-Level Interconnect Technology hanks to advanced scaling techniques over the past 20 years, device performance and operating speeds have skyrocketed. Clock frequencies already exceed 200 MHz in submicron RISC microprocessors. As the minimum feature size has continued to scale down to submicron proportions. however. minimum interconnect line widths and spac-ings have, of necessity, followed. As a result, interconnect performance has become a limiting factor impinging on circuitdoi:10.1109/101.340307 fatcat:hcl6hg47knemtnvqaxhzb5rlze