Fabrication of Field Emission Cathode with Sputtering Deposition
スパッタ法による電界放射カソードの試作

Nobuya SEKO, Mikio MOURI, Osamu ISHIKURA, Akio OKAMOTO, Yoshihiko SUZUKI, Souichi OGAWA
1994 Shinku  
doi:10.3131/jvsj.37.270 fatcat:gcvh6dyqqbgzrnovn7cu4v7kh4