A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is
Microelectromechanical systems (MEMS) have been already successfully commercialized for around 20 years. The design of novel MEMS sensors currently targets two important features: smaller dimensions and higher reliability. As the characteristic size of the mechanical components of the devices decreases, uncertainties in the mechanical and geometrical properties induced by the microfabrication process become more and more important. To address these issues, an on-chip testing device has beendoi:10.3390/ecsa-3-s1001 fatcat:vrdttmw6pbavvcm5ytygn3hske