SPMを用いた微細加工 SPMを用いた卓上微細加工装置とその応用
Destop Nanofabrication Tool using SPM and its Applications

Masaaki FUJIMORI, Masayoshi ISHIBASHI, Midori KATO, Seiji HEIKE, Takeshi SHIMOMURA, Kohzo ITO, Tomihiro HASHIZUME
2005 Journal of the Japan Society for Precision Engineering  
doi:10.2493/jjspe.71.315 fatcat:pafnidnapjco7ja5hpks4vc3yy