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SPMを用いた微細加工 SPMを用いた卓上微細加工装置とその応用
Destop Nanofabrication Tool using SPM and its Applications

Masaaki FUJIMORI, Masayoshi ISHIBASHI, Midori KATO, Seiji HEIKE, Takeshi SHIMOMURA, Kohzo ITO, Tomihiro HASHIZUME
2005 Journal of the Japan Society for Precision Engineering  

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doi:10.2493/jjspe.71.315 fatcat:pafnidnapjco7ja5hpks4vc3yy
lang:ja
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Masaaki FUJIMORI, Masayoshi ISHIBASHI, Midori KATO, Seiji HEIKE, Takeshi SHIMOMURA, Kohzo ITO, Tomihiro HASHIZUME. "SPMを用いた微細加工 SPMを用いた卓上微細加工装置とその応用." Journal of the Japan Society for Precision Engineering 71.3 (2005) 315-319